3D simulations of device performance for 3D-Trench electrode detector

作者:Chen, Jianwei; Ding, Hao; Li, Zheng*; Yan, Shaoan
来源:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , 2015, 796: 34-37.
DOI:10.1016/j.nima.2015.04.023

摘要

A square 3D Trench electrode Si detector structure is simulated using a 3D TCAD tool, Electrical characteristics including electrostatic potential, electric field, leakage current, and capacitance have been simulated in derail It has been found in simulations that both leakage current and the voltage to reach the geometry capacitance (full depletion voltage, yrd) increase with radiation fluence. The geometry capacitance is 99 fF for the standard structure in our study. Detector geometry capacitance's dependence on the length and area of the collection column has also been simulated.