Development of magnetically driven microvalve using photosensitive SU-8/Fe composite

作者：Suzuki Junya; Terao Kyohei; Takao Hidekuni; Shimokawa Fusao; Oohira Fumikazu; Miyagawa Hayato; Suzuki Takaaki^*

来源：International Journal of Applied Electromagnetics and Mechanics, 2016, 52(3-4): 1585-1590.

DOI：10.3233/JAE-162186

• SU-8/Fe composite
• microvalve
• magnetic driving

We propose a magnetically driven microvalve made of negative photoresist SU-8 containing magnetic pure iron particles as a magnetically driven actuator and valve element. SU-8/Fe composite forms the magnetically driven component using a photolithography and wet etching. The composite valve element made of SU-8/Fe composite in the microchannel is rotated by the external magnetic field of a permanent magnet. The flow reduction ratio of about 44% and the pressure resistance of 4.6 kPa are experimentally measured on the prototype.

• 出版日期2016