Water soluble nano-scale transient material germanium oxide for zero toxic waste based environmentally benign nano-manufacturing

作者：Almuslem A S; Hanna A N; Yapici T; Wehbe N; Diallo E M; Kutbee A T; Bahabry R R; Hussain M M

来源：Applied Physics Letters, 2017, 110(7): 074103.

DOI：10.1063/1.4976311

<jats:p>In the recent past, with the advent of transient electronics for mostly implantable and secured electronic applications, the whole field effect transistor structure has been dissolved in a variety of chemicals. Here, we show simple water soluble nano-scale (sub-10 nm) germanium oxide (GeO2) as the dissolvable component to remove the functional structures of metal oxide semiconductor devices and then reuse the expensive germanium substrate again for functional device fabrication. This way, in addition to transiency, we also show an environmentally friendly manufacturing process for a complementary metal oxide semiconductor (CMOS) technology. Every year, trillions of complementary metal oxide semiconductor (CMOS) electronics are manufactured and billions are disposed, which extend the harmful impact to our environment. Therefore, this is a key study to show a pragmatic approach for water soluble high performance electronics for environmentally friendly manufacturing and bioresorbable electronic applications.</jats:p>

• 出版日期2017-2-13