摘要

In this paper the effect of nitrogen ion implantation at the energy of 50 keV and doses in the range between 10(17) and 2 x 10(18) ions/cm(2) on silver surface has been discussed. X-ray diffraction (XRD) analysis was used to characterize microstructure of implanted layer. The XRD results confirmed that by such implantation AgN3 has been produced. Silver trinitride with orthorhombic structure was formed on cubic structure of silver surface. RMS roughness of implanted samples have been obtained using atomic force microscopy (AFM) analysis and compared with un-implanted sample. Microhardness properties of implanted samples measured by Vickers test. The results show that by increasing the ion dose up to 1 x 10(18) ions/cm(2) hardness enhances. Finally, reflection changes at the UV-Vis-NIR region measured by diffuse reflectance accessory of a spectrophotometer. The results of spectrophotometry analysis show reduction in diffused reflection spectrum of nitrogen implanted samples.

  • 出版日期2011-4