Antiadhesion surface treatments of molds for high-resolution unconventional lithography

作者:Lee Min Jung; Lee Nae Yoon; Lim Ju Ri; Kim Jong Bok; Kim Mihee; Baik Hong Koo; Kim Youn Sang*
来源:Advanced Materials, 2006, 18(23): 3115-+.
DOI:10.1002/adma.200601268

摘要

A new strategy to achieve antiadhesion surface coatings is introduced. The approach, which uses molds coated in a thin film of poly (dimethylsiloxane) (PDMS, see figure) to achieve the antiadhesive surfaces, is applicable to virtually any type of mold material due to the use of silane chemistry and the low surface energy of PDMS. This allows simple and rapid replication of high complexity, high-aspect-ratio nanostructures with excellent replication fidelity.

  • 出版日期2006-12-4