科研之友
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摘要
Microfabricated cantilever scanning probes are used for a variety of technological applications. Piezoresistivity and piezoelectricity are two transduction mechanisms that are commonly used to sense cantilever deflection. Despite their widespread use, their performance has not been directly compared to date. In this paper we present detailed models for the noise and sensitivity of both transducer types, design optimized cantilevers via numerical optimization for a variety of use cases, and compare their performance using a range of reported values in the literature. We find that piezoresistive sensing is advantageous for sub-micron thick cantilevers and moderate electrical power dissipation conditions, while piezoelectric sensing is preferred for thick cantilevers and power-limited applications. The wide variability in experimentally measured piezoelectric film properties is treated using the Monte Carlo method and can account for resolution variation of up to 30%, independent of geometric tolerances. We find that the preferred cantilever type depends heavily upon the fabrication and operating constraints. Accordingly, the modeling and optimization code is an open source and freely available. Importantly, we show that both piezoresistive and piezoelectric cantilevers are capable of sensing piconewton and sub-nanometer signals for a wide range of operating conditions with an appropriate design.
- 出版日期2010-9
