A closed-loop MEMS accelerometer with capacitive sensing interface ASIC

作者：Liu Minjie; Chi Baoyong; Liu Yunfeng; Dong Jingxin^*

来源：International Journal of Electronics, 2013, 100(1): 21-35.

DOI：10.1080/00207217.2012.669719

• accelerometer
• closed-loop
• interface ASIC
• sample-charge
• switched-capacitor

A closed-loop MEMS accelerometer with capacitive sensing interface ASIC (application specific integrated circuit) is presented. The parasitic-insensitive switched-capacitor sample-charge architecture is used to implement the capacitive sensing, which is crucial to the case where sensor and interface ASIC are combined in a two-chip approach to implement the closed-loop MEMS accelerometer. Based on the 0.35?mu m CMOS sensing interface ASIC, an accelerometer prototype has been implemented, in which force-rebalance with the lag-proportionalintegral controller is applied to improve the system stability and frequency response performance, and the testing results indicate the sensitivity of the presented accelerometer is 650?mV/g, the full measurement range +/-15?g, the non-linearity 0.098% and the noise floor 23.17?mu g/rt-Hz.

• 出版日期2013-1-1
• 单位清华大学