科研之友
微信
新浪微博
Facebook
分享链接
摘要
A novel method for fabricating a miniaturized ionic polymer-metal composite (IPMC) with plated gold electrodes is developed by combining selective plasma irradiation and electroless plating. The membrane is irradiated by SF6 or CF4 plasmas through a stencil mask prior to plating to prevent deposition of a gold electrode in the plasma-irradiated area. Miniaturized IPMCs are fabricated with a 400-m-wide line-and-space pattern. The proposed method has the potential to realize miniaturized IPMCs combined with microelectromechanical system (MEMS) devices because this provides a direct and simple fabrication process.
- 出版日期2014-9
