Mems mixer as an example of a novel construction method of microfluidics by discrete microparts

作者:Murakami Y*; Araki K; Ohashi R; Honma H; Misawa N; Takahashi K; Sawada K; Ishida M
来源:Sensors and Actuators B: Chemical , 2014, 194: 528-533.
DOI:10.1016/j.snb.2013.12.100

摘要

This paper describes a novel approach to construct and/or functionalize a microfluidic chip with discrete microparts that are microfabricated small enough to place them in a microchannel. A preliminary demonstration was shown as a passive mixer. Microparts of several hundred micrometers were fabricated by double-sided etching with ICP RIE. The parts were manually placed in a typical Y-shaped PDMS microchannel. Fluorescence observation revealed that the constructed microfluidics had the same mixing ability as a fully silicon MEMS mixer. The configuration that is unattainable by the normal preassembled structure can also be fabricated.

  • 出版日期2014-4