Deposition of Large-Area and Protective Diamond-like Carbon Coatings on Glass Substrates by Low-Pressure Dielectric Barrier Discharges

作者：Niu, Jinhai^*; Liu, Dongping; Ou, Yangbiao; You, Yuting; Yu, Naisen

来源：Chemical Vapor Deposition, 2010, 16(7-9): 203-+.

DOI：10.1002/cvde.200904283

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• PLASMA

Large-area (370mm x 500mm) diamond-like carbon (DLC) films were deposited on the glass substrate by low-pressure dielectric barrier discharges. The deposited DLC films were hard, homogeneous and extremely smooth. The DLC film deposited on the large-area glass can be potentially used as a scratch resistant and corrosion barrier layer.

• 出版日期2010-9
• 单位厦门大学; 大连民族大学