Application Study of Nanoimprint to Fabricate DWDM DFB Laser

作者:Liu Wen*; Wang Lei; Zhou Ning; Zhang Yiwen; Qiu Fei; Xu Zhimou; Wang Dingli; Li Linsong; Cao Mingde
来源:China Communications, 2010, 7(3): 134-138.

摘要

Distributed Feedback Laser Diodes (DFB LD) which satisfy the requirement for DWDM system is a key component for fiber communication industry. Now technologies of LD material epitaxial growth and package have been well developed in China, however, to manufacture the diffraction gratings which satisfy the DWDM request is still a challenge, and it is become a bottle-neck for further cost reduction. in this work, nanoimprint was used to fabricate DFB laser diode. Our result shows, the performance of DFB LD manufactured by nanoimprint is as good as that manufactured by EBL, but nanoimprint provides the advantage of high yield and low cost.