科研之友
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摘要
A homodyne interferometer exploits the polarizing theory and four-detector-array based on Michelson interferometry is proposed for angle measurement. The angular displacement of the object mirror will cause the optical path difference between the two reflected beams so as to produce interference. The quadrature signals with 90 degrees phase shift will be collected by photo-detectors. With pulse counting and phase subdivision processing the angular movement can be calculated. The proposed structure is also featured by its miniature design. The optical system is only 45 mm by 45 mm in area. In order to facilitate the alignment of optical components and improve the signal quality, a new optical bonding technology by mechanical fixture is proposed so that the miniature optics can be permanently pressed together without air gap in between. Experiments show that the resolution is 0.01 %26apos;%26apos; and the accuracy is less than 0.2 %26apos;%26apos; for the measurement range of +/- 120 arc seconds.
- 出版日期2013-2
- 单位南阳理工学院
