Absolute distance measurement with micrometer accuracy using a Michelson interferometer and the iterative synthetic wavelength principle

作者：Alzahrani Khaled^*; Burton David; Lilley Francis; Gdeisat Munther; Bezombes Frederic; Qudeisat Mohammad

来源：Optics Express, 2012, 20(5): 5658-5682.

DOI：10.1364/OE.20.005658

We present a novel system that can measure absolute distances of up to 300 mm with an uncertainty of the order of one micrometer, within a timeframe of 40 seconds. The proposed system uses a Michelson interferometer, a tunable laser, a wavelength meter and a computer for analysis. The principle of synthetic wave creation is used in a novel way in that the system employs an initial low precision estimate of the distance, obtained using a triangulation, or time-of-flight, laser system, or similar, and then iterates through a sequence of progressively smaller synthetic wavelengths until it reaches micrometer uncertainties in the determination of the distance. A further novel feature of the system is its use of Fourier transform phase analysis techniques to achieve sub-wavelength accuracy. This method has the major advantages of being relatively simple to realize, offering demonstrated high relative precisions better than 5 x 10(-5). Finally, the fact that this device does not require a continuous line-of-sight to the target as is the case with other configurations offers significant advantages.

• 出版日期2012-2-27