Ultrahigh hardness and high electrical resistivity in nano-twinned, nanocrystalline high-entropy alloy films

作者：Huo, Wenyi; Liu, Xiaodong; Tan, Shuyong; Fang, Feng^*; Xie, Zonghan; Shang, Jianku; Jiang, Jianqing

来源：Applied Surface Science, 2018, 439: 222-225.

DOI：10.1016/j.apsusc.2018.01.050

• High-entropy alloy film
• Nanocrystalline
• Nano-twin
• Mechanical properties
• Resistivity

Nano-twinned, nanocrystalline CoCrFeNi high-entropy alloy films were produced by magnetron sputtering. The films exhibit a high hardness of 8.5 GPa, the elastic modulus of 161.9 GPa and the resistivity as high as 135.1 mu Omega.cm. The outstanding mechanical properties were found to result from the resistance of deformation created by nanocrystalline grains and nano-twins, while the electrical resistivity was attributed to the strong blockage effect induced by grain boundaries and lattice distortions. The results lay a solid foundation for the development of advanced films with structural and functional properties combined in micro-/nano-electronic devices.

• 出版日期2018-5-1
• 单位东南大学; 南京工程学院