Directed self-assembly of mesoscopic electronic components into sparse arrays with controlled orientation using diamagnetic levitation

作者：Tkachenko Anton^*; Lu James J Q

来源：Journal of Magnetism and Magnetic Materials, 2015, 385: 286-291.

DOI：10.1016/j.jmmm.2015.03.022

• Directed self-assembly
• Mesoscopic
• Diamagnetic levitation

This paper presents a directed self-assembly (DSA) approach for assembling small electronic components, such as semiconductor dies, into sparse 2D arrays using diamagnetic levitation. The dies attached to a diamagnetic layer can be levitated at a room temperature over a stage made of magnets arranged in a checkerboard pattern. By selecting a proper die design, levitation height, and vibration pattern of the magnetic stage we assemble the dies into a regular 2D array with a specific lateral and vertical orientation of the dies. The assembled dies are transferred to a receiving substrate using capillary force.

• 出版日期2015-7-1