A Correlation Between Oxygen Vacancies and Reliability Characteristics in a Single Zirconium Oxide Metal-Insulator-Metal Capacitor

作者：Kwon Hyuk Min; Kwon Sung Kyu; Jeong Kwang Seok; Oh Sung Kwen; Oh Sun Ho; Choi Woon Il; Kim Tae Woo; Kim Dae Hyun; Kang Chang Yong; Lee Byoung Hun; Kirsch Paul; Lee Hi Deok^*

来源：IEEE Transactions on Electron Devices, 2014, 61(8): 2619-2627.

DOI：10.1109/TED.2014.2326423

• Charge trapping
• Frenkel-Poole (F-P) emission
• high-kappa (HK) dielectric
• metal-insulator-metal (MIM) capacitor
• time-dependent dielectric breakdown (TDDB)
• Weibull distribution
• ZrO2

A correlation between reliability characteristics and failure mechanisms for time-dependent dielectric breakdown for a single ZrO2 metal-insulator-metal capacitor has been studied. Frenkel-Poole emission was the dominant mechanism in the high electric field region. The extracted dynamic constant and trap energy level were 4.013 and 0.963 eV, respectively. The variation of alpha as a function of stress time under constant voltage stress (CVS) gradually decreased. Moreover, Delta C-stress/C-0 under dynamic voltage stress was much greater than under CVS, which indicates that new defects and charge trapping could be generated in high-kappa (HK) dielectric under dynamic voltage stress under negative voltage as well as positive voltage. The extracted average value of the Weibull slope (beta) at 125 degrees C was in the range 1.3-1.6. The average field acceleration parameter was degrees 8.67 cm/MV, and an effective dipole moment of bond breakage p(eff) was similar to 29.73e angstrom. The thermochemical model (E model) suggested that the oxygen vacancies induced by the dipolar energy contribution (p . E-loc) easily caused bond breakage in the HK dielectric. The energy required to form another V-0 was weakened to the bond strength of polar molecules. The characteristic breakdown strength (E-BD) of ZrO2 was 6.31 MV/cm, and the extracted activation energy Delta H-0* was 1.874 eV when considering E model.

• 出版日期2014-8