Ultraviolet patterning of KTiOPO4 thin films through metallo-organics

作者：Noda K^*; Sakamoto W; Yogo T; Hirano S

来源：Journal of Materials Research, 1999, 14(1): 222-227.

DOI：10.1557/JMR.1999.0033

Patterned KTiOPO4 (KTP) films were successfully synthesized through metallo-organics using ultraviolet (uv) patterning. A homogeneous precursor solution was prepared by the reaction control of ((BuO)-Bu-n)(2)P(O)(OH), Ti(OEt)(4), and KOEt in ethanol. The solubility of the KTP precursor films in ethanol changed with uv irradiation because of the polymerization of KTP precursor. The patterned KTP precursor films crystallized to single-phase KTP after heat treatment at 600 degrees C for 2 h. The patterned films were found to be exactly stoichiometric KTP.

• 出版日期1999-1