Micro-scaled hydrogen gas sensors with patterned anodic titanium oxide nanotube film

作者：Kimura Yasuo^*; Kimura Shota; Kojima Ryota; Bitoh Mitsuo; Abe Munemitsu; Niwano Michio

来源：Sensors and Actuators B: Chemical , 2013, 177: 1156-1160.

DOI：10.1016/j.snb.2012.12.016

• Anodization
• Titanium oxide nanotube
• Self-organization
• Miniaturization

We have fabricated gas sensors with micro-scale-patterned anodic titanium oxide nanotube films formed by local anodization of titanium wires using a hybrid process between top-down (photolithography) and bottom-up (anodization) processes. We examine the response characteristics of the sensors for hydrogen gas to demonstrate that a few % of hydrogen gas in nitrogen ambient produces currents in the range of mA without special interdigitated electrodes. The sensitivity is remarkably improved by thinning the tube walls. The hybrid process is a suitable method for fabrication of micro-scaled gas sensors, which has useful features such as low power consumption, high reliability and portability.

• 出版日期2013-2