摘要

The nonlinear continuum model proposed by Cuerno and Barabasi is the most successful and widely acceptable theoretical description of oblique incidence ion sputtered surfaces to date and is quite robust in its predictions of the time evolution and scaling of interfaces driven by ion bombardment. However, this theory has thus far predicted only ripple topographies and rough surfaces for short and large scales, respectively. As a result, its application to the interpretation and study of nanodots, predicted by Monte Carlo simulations for, and observed in experiments of,oblique incidence sputtering is still unclear and,hence, an open problem. In this paper, we provide a new insight to the theory, within the same length scale,that explains nanodot formation on off-normal incidence sputtered surfaces, among others, and propose ways of observing the predicted topographies of the MC simulations, as well as possible control of the size of the nanodots, in the framework of the Cuerno-Barabasi continuum theory.

  • 出版日期2012-7