科研之友
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摘要
Two methods were applied to prepare hydrophobic silica antireflective (AR) coatings by sol-gel process. With hexamethydisizane (HMDS) as tri-methyl modifiers, methyl-modified silica sols was prepared and hydrophobic coatings were achieved by depositing such modified sols on substrate. Another way was a post-treatment method. By treating the standard TEOS-based sol-gel silica AR coatings with selected vapor produced hydrophobic coatings too. And the resulting sol-gel AR coatings were tested for their stability in vacuum. As a result of the comparative study, vapor-phase silylation is more suitable to prepare hydrophobic anti-reflective coatings with required high optical performance.
