Development of a Roll Press UV Imprint Process for Replication of Microstructures on a Large and Thin Quartz Substrate

作者:Okubo Motonori*; Tsutsui Yutaka; Ishibashi Kentaro; Li Lingyi; Shoji Shuichi; Mizuno Jun; Yanagisawa Masumi
来源:Journal of Photopolymer Science and Technology, 2012, 25(2): 229-234.
DOI:10.2494/photopolymer.25.229

摘要

In this study, fabrication of microstructures was carried out using newly developed UV imprinting system named "Roller Press Scan (R)" for large-area replication. Micro lens arrays were replicated using two types of UV resins and molds, onto quartz substrates. Microstructures have been replicated in uniform and have been confirmed high-throughput productivity.

  • 出版日期2012