Amorphous Indium Titanium Zinc Oxide Thin Film Transistor and Impact of Gate Dielectrics on Its Photo-Electrical Properties

作者：Hsu Ming Hung; Chang Sheng Po^*; Chang Shoou Jinn^*; Wu Wei Ting; Li Jyun Yi

来源：ECS Journal of Solid State Science and Technology, 2018, 7(7): Q3049-Q3053.

DOI：10.1149/2.0071807jss

Bottom-gate thin film transistors (TFTs) with indium titanium zinc oxide (InTiZnO) active layer were prepared by radio-frequency (RF) sputtering system at room temperature. Alumina was introduced as the gate dielectric material to acquire better electrical properties by improving the quality of interface between dielectric and channel layer. At zero gate bias and under 290-nm light illumination, the TFTs exhibited a photoresponsivity of 2.3 A/W. The photo-to-dark current ratio was almost up to 10(5) and the UV-to-visible rejection ratio was 1817. These results revealed that InTiZnO, as a novel UV-sensitive material, had potential for practical optoelectronic applications with high performance.

• 出版日期2018