High Quality Assembly of Phase-Only Liquid Crystal on Silicon (LCOS) Devices

作者：Zhang Zichen^*; Jeziorska Chapman Anna M; Collings Neil; Pivnenko Mike; Moore John; Crossland Bill; Chu Daping P; Milne Bill

来源：Journal of Display Technology, 2011, 7(3): 120-126.

DOI：10.1109/JDT.2010.2051318

• Liquid-crystal (LC) devices
• modulators
• phase modulation

Liquid crystal on silicon (LCOS) for phase-only holography is ideally made to better optical tolerance than that for conventional amplitude modulating applications. Die-level assembly is suited to custom devices and pre-production prototypes because of its flexibility and efficiency in conserving the silicon backplane. Combined with automated assembly, it will allow high reproducibility and fast turnaround time, paving the way for pre-production testing and customer sampling before mass production. Pre-assembly optical testing is the key element in the process. By taking into account the flatness of both the backplane and the front glass plate, we have assembled high quality LCOS devices. We have reached our aim of less than one quarter wavelength phase distortion across the active area.

• 出版日期2011-3