作者：Potter Dominic B; Powell Michael J; Parkin Ivan P; Carmalt Claire J
来源：Journal of Materials Chemistry C, 2018, 6(3): 588-597.
DOI：10.1039/c7tc04003b
摘要
Aluminium/gallium co-doped ZnO (AGZO), indium/gallium co-doped ZnO (IGZO), and aluminium/indium co-doped ZnO (AIZO) thin films were synthesised on glass substrates via aerosol assisted chemical vapour deposition (AACVD).
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