MEMS acceleration switch with bi-directionally tunable threshold

作者：Kim Hyunseok; Jang Yun Ho; Kim Yong Kweon; Kim Jung Mu^*

来源：Sensors and Actuators A: Physical , 2014, 208: 120-129.

DOI：10.1016/j.sna.2014.01.003

• Acceleration switch
• Threshold acceleration
• Bi-directional tuning
• MEMS inertial sensor

A MEMS acceleration switch capable of tuning threshold acceleration to either higher or lower levels is designed and implemented with comb drive actuators as a mechanism of threshold tuning. A small sized switch (1.6 X 3.1 x 0.55 mm(3)) is successfully realized by patterning silicon structures on a glass wafer. The resonant frequency of fabricated switches agrees well with a designed frequency of 1.1 kHz. The threshold acceleration at no tuning voltage is 10.25 g and it is subsequently tuned to 2.0 g and 17.25 g by applying 30V to pushing comb and pulling comb, respectively. The rising time is measured to be 9.8 ms. Additional functionalities such as safe/armed position convertibility and single use latching switch are also described for diverse applications of the tunable acceleration switches.

• 出版日期2014-2-1