A terahertz ellipsometer

作者：Azarov I A^*; Shvets V A; Prokopiev V Yu; Dulin S A; Rykhlitskii S V; Choporova Yu Yu; Knyazev B A; Kruchinin V N; Kruchinina M V

来源：Instruments and Experimental Techniques, 2015, 58(3): 381-388.

DOI：10.1134/S0020441215030033

A terahertz ellipsometer, based on the Novosibirsk free electron laser (FEL), is described. The device operates using the dynamic photometric "polarizer-sample-analyzer" scheme with a rotating analyzer. Sources of systematic errors, attributed to imperfections of optical elements, the accuracy of their alignment, and the influence of random errors, which are caused by measuring-section noises, were analyzed. The whole device and its separate units were tested. From results of measurements on tested samples, the operation accuracy of the ellipsometer was determined: delta I a (c) 1/2 0.3A degrees and delta(cos Delta) a (c) 1/2 0.01. The measurement data obtained at a wavelength of 147 mu m on the thickness and reflective index of blood films, which were deposited on a silicon substrate, are presented. In this case, the measurement accuracy of the reflective index is +/- 0.05 and thickness is 0.2 mu m.

• 出版日期2015-5