A full description of a scalable microfabrication process for arrayed electrowetting microprisms

作者：Hou L^*; Zhang J; Smith N; Yang J; Heikenfeld J

来源：Journal of Micromechanics and Microengineering, 2010, 20(1): 015044.

DOI：10.1088/0960-1317/20/1/015044

Most electrowetting and liquid crystal optical devices are created by standard planar microfabrication. Arrayed electrowetting microprisms are a newer approach that offers unique performance, but which requires a challenging non-planar microfabrication process. This paper reviews a full description of a scalable fabrication process for an similar to 1500 element array of similar to 150 mu m size electrowetting microprisms. The description includes creation of high aspect-ratio sidewalls, using a conventional i-line mask aligner to vertically pattern electrodes, conformal hydrophobic dielectric deposition, self-assembled and volume-controlled liquid dosing and module sealing. Also presented is a theoretical model which explores the resolution limits for vertically patterned electrodes. In addition to creating a first-generation fabrication process for arrayed electrowetting microprisms, this work may be further useful to investigators seeking methods of forming 3D arrayed electro-optic, electro-chemical or electro-mechanical devices.

• 出版日期2010-1