Design and fabrication of microcantilever integrated with PZT thin film sensor and actuator

作者：Liu Mengwei; Tong Jianhua; Cui Tianhong; Dong Weijie; Cui Yan; Wang Jing; Wang Liding

来源：China Mechanical Engineering, 2005, 16(SUPPL.): 467-468.

The paper presented two types of piezoelectric microcantilevers, the two-layer and two-segment piezoelectric cantilevers. Based on the direct and converse piezoelectric effect, the two piezoelectric parts performed sensor and actuator functions respectively. The microcantilever was fabricated by silicon bulk micromachining. Lead zirconate titanate PbZr0.5Ti0.5O3(PZT) thin film was prepared by sol-gel method on Pt/Ti/SiO2/Si substrate. The film has single perovskite phase structure and (111) preferred orientation. The key micromachining processes have been optimized to enhance the property and to increase yield of the piezoelectric microcantilevers.

• 出版日期2005