科研之友
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摘要
The nickel micro pillars with high aspect ratio were manufactured using the negative-type resin mold. The resin master model was plated by nickel after the sputtering of gold, and was sublimated to take the products out. The pillar of 47.5 mu m in diameter and 300 mu m in height was produced by letting the bottom of the negative shape to be the cathode of the electroplating. The aspect ratio more than 8 was found to be achievable. The micromolding method will expand the producible size and shape of the metal micro products.
- 出版日期2013
- 单位RIKEN
