Highly conductive and damp heat stable transparent ZnO based thin films for flexible electronics

作者：Jung Keun; Choi Won Kook; Chae Keun Hwa; Song Jong Han; Yoon Seok Jin; Lee Myung Hyun; Choi Ji Won^*

来源：Journal of Alloys and Compounds, 2013, 554: 240-245.

DOI：10.1016/j.jallcom.2012.11.021

• Electrode materials
• Oxide materials
• Thin films
• Electronic properties
• Optical properties
• EXAFS

Al doped ZnO (AZO) thin films were deposited at room temperature by continuous composition spread method. Various compositions of AZO thin films deposited at room temperature were explored to find excellent electrical and optical properties. The explored composition, 3.13 wt.% Al doped ZnO, was obtained with the lowest resistivity and the highest transmittance. We deposited the optimized AZO composition by on-axis RF sputtering to deposit uniform large area thin film and got a thin film with superior electrical, optical, and damp heat properties although it deposited at room temperature (resistivity: 6.5 x 10(-4) Omega cm, average transmittance in visible region: 92%).

• 出版日期2013-3-25