A Facile Route for Producing Single-Crystalline Epitaxial Perovskite Oxide Thin Films

作者：Akbashev Andrew R; Chen Guannan; Spanier Jonathan E^*

来源：Nano Letters, 2014, 14(1): 44-49.

DOI：10.1021/nl4030038

• atomic layer deposition
• BiFeO3
• perovskite
• ferroelectric
• multiferroic
• epitaxy

We report how a low vacuum pressure process followed by a few-minute annealing enables epitaxial stabilization, producing high-quality, phase-pure, single-crystalline epitaxial, and misfit dislocation-free BiFeO3(001) thin films on SrTiO3(001) at similar to 450 degrees C less than current routes. These results unambiguously challenge the widely held notion that atomic layer deposition (ALD) is not appropriate for attaining high-quality chemically complex oxide films on perovskite substrates in single-crystalline epitaxial form, demonstrating applicability as an inexpensive, facile, and highly scalable route.

• 出版日期2014-1