Direct patterning on side chain crystalline polymer by thermal nanoimprinting using mold without antisticking layer

作者：Okada Makoto^*; Nakano Shinichi; Yamashita Koji; Kawahara Shinichiro; Matsui Shinji

来源：Microelectronic Engineering, 2011, 88(8): 2084-2087.

DOI：10.1016/j.mee.2011.02.036

• Nanoimprint lithography (NIL)
• Side chain crystalline polymer
• Crystallization phase transition
• Thermal nanoimprint

Nanoimprint lithography (NIL) has been attracting attention of many industries because of its potential to produce various nanostructure applications through a simple, low-cost, and high-throughput process. The Intelimer is a side chain crystalline polymer. The crystallization phase transition of the side chain of the Intelimer is induced by increasing and decreasing temperature. The adhesive force of the Intelimer increases when the Intelimer is in the non-crystalline state. On the other hand, the adhesive force of the Intelimer decreases when the Intelimer is in the crystalline state. We focused on this characteristic of the Intelimer and placed a thermal nanoimprint onto the Intelimer by using a mold without an antisticking layer. As the result, the pattern was clearly imprinted on the Intelimer. In addition, the mold did not adhere to the Intelimer.

• 出版日期2011-8