摘要
Generation of high-power pulses of extreme ultraviolet radiation from multi-charged tin plasma is of great interest to many applications. We studied the electric potential distribution in the discharge gap in kind of the electric double layer and its effect on the extreme ultraviolet generation. The local plasma heating by electron beam, formed in the double layer, leads to generation of peak radiation pulses and as a result to an increase in the radiation power.
- 出版日期2013-1-3