Nondestructive Optical Characterization of Fabry-Perot Cavities by Full Spectra Fitting Method

作者：Hasar Ugur C^*; Ozbek I Yucel; Karacali Tevhit

来源：IEEE Photonics Technology Letters, 2018, 30(15): 1404-1407.

DOI：10.1109/LPT.2018.2849844

• Porous-silicon
• Fabry-Perot
• optical characterization
• full spectra fitting technique

Porous silicon (PSi) Fabry-Perot (FP) cavities are the sensor types widely employed in sensing applications of chemical, biological, or gas molecules. Prior to sensor operation, each fabricated empty (no-molecule) PSi FP cavity is characterized by their optical properties (refractive indices and thicknesses of each layer). For this characterization, a scanning electron microscope (SEM) image of a cut sample from the batch FP cavity is measured to monitor the thickness variation of each layer. This technique is surely destructive and gives local information of only the broken cut sample. In this letter, we apply the full spectra fitting technique for nondestructive and accurate optical characterization of empty PSi FP cavities. To demonstrate the potential of this technique, we obtained the optimized thicknesses of each layer of two fabricated PSi FP cavities with resonating wavelengths of 542 and 1456 nm and compared them with the thicknesses obtained from their SEM images. From this analysis, we note that the proposed technique can be a good candidate for nondestructive characterization of empty FP cavities.

• 出版日期2018-8-1