Direct and quantitative evidence for buckling instability as a mechanism for roughening of polymer during plasma etching

作者：Lin T C; Bruce R L; Oehrlein G S; Phaneuf R J^*; Kan H C

来源：Applied Physics Letters, 2012, 100(23): 233113.

DOI：10.1063/1.4718940

We investigate elastic buckling as a driving force for roughening of polystyrene, a model resist, during plasma etching. Force curve measurements of the effective modulus of etched polystyrene films, along with modeling which accounts for adhesive forces and surface corrugation, show that an extremely stiff modified layer results from Ar-ion etching, with the modulus increasing with incident energy. The results are in good quantitative agreement with analysis based on the observed dominant corrugation wavelength, and buckling theory providing the corrugation is taken into account.

• 出版日期2012-6-4