Deep reactive ion etching of auxetic structures: present capabilities and challenges

作者：Muslija Alban^*; Diaz Lantada Andres

来源：Smart Materials and Structures, 2014, 23(8): 087001.

DOI：10.1088/0964-1726/23/8/087001

• auxetics
• negative Poisson ratio
• metamaterials
• morphing structures

Auxetic materials (or metamaterials) have negative Poisson ratios (NPR) and display the unexpected properties of lateral expansion when stretched, and equal and opposing densification when compressed. Such auxetic materials are being used more frequently in the development of novel products, especially in the fields of intelligent expandable actuators, shape-morphing structures and minimally invasive implantable devices. Although several micromanufacturing technologies have already been applied to the development of auxetic materials and devices, additional precision is needed to take full advantage of their special mechanical properties. In this study, we present a very promising approach for the development of auxetic materials and devices based on the use of deep reactive ion etching (DRIE). The process stands out for its precision and its potential applications to mass production. To our knowledge, it represents the first time this technology has been applied to the manufacture of auxetic materials with nanometric details. We take into account the present capabilities and challenges linked to the use of DRIE in the development of auxetic materials and auxetic-based devices.

• 出版日期2014-8