Micropatterning PEDOT:PSS layers

作者：Charlot Benoit^*; Sassine Gilbert; Garraud Alexandra; Sorli Brice; Giani Alain; Combette Philippe

来源：Microsystem Technologies, 2013, 19(6): 895-903.

DOI：10.1007/s00542-012-1696-5

PEDOT:PSS is a conductive polymer that is used as electrodes in organic electronic devices, but also in neuronal probes and implantable devices. This material can also be used for building deformable electrodes in soft substrates for several sensing applications. However, this material being sensitive to several chemicals and moisture it is difficult to pattern microstructures using standard lithography techniques. This paper will review and show some techniques developed for patterning PEDOT:PSS thin films using both soft lithography, such as microcontact printing and shadow masking, and conventional lithography techniques. In addition of this review we present a new lithography technique using silicon nitride protection layer and an analysis and comparison of ICP RIE dry plasma etch rates of PEDOT:PSS with different gases.

• 出版日期2013-6