Annealing temperature and microstructures of vacuum Co-evaporated CuxTe films

作者：Wu Xiaoli^*; Xia Gengpei; Zheng Jiagui; Li Wei; Feng Lianghuan; Wu Lili; Zhang Jingquan; Li Bing; Lei Zhi

来源：Chinese Journal of Vacuum Science and Technology, 2008, 28(4): 360-364.

• Annealing temperature
• Co-evaporated
• CuxTe thin films
• Structure
• Vacuum co-evaporation technique

The CuxTe(1&lex&le2) films were grown by vacuum co-evaporation on quartz wafer substrates, and annealed at different temperatures. Its microstructures were characterized with X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). The impact of the annealing temperature and stoichiometry of Cu on the phase transition of the films was studied. The results show that the stoichiometry of Cu closely correlates to the phase transition of the films. For instance, after annealing of the as-deposited, amorphous dominant films with small x, some polycrystalline can be observed. As the annealing temperature rises up, the degree of the phase transition markedly varies with x, especially at a small x(x=1, or 1.44). We suggest that the crystallization temperature of the film depends on its stoichiometry of Cu; the smaller the x, the higher the crystallization temperature. With CuxTe films as the back contact, the conversion efficiency of the small area CdS/CdTe solar cells was found to be 12.5%.

• 出版日期2008
• 单位四川大学