Microvia fill process model and control

作者：Pohjoranta Antti^*; Tenno Robert

来源：Journal of Mathematical Chemistry, 2014, 52(5): 1414-1440.

DOI：10.1007/s10910-014-0320-6

• Microvia filling
• Microvia fill control
• Microvia fill modeling
• Deposition control

This paper presents an overview of the modeling and model based control of the microvia fill process. A detailed, general-purpose microvia fill model that utilizes the arbitrary Lagrange-Eulerian method for shape change modeling is presented first. Modeling results are presented and compared with the measured data. Then a simplified model of the process is presented followed by a model based control algorithm being developed based on the simplified stochastic model with typical uncertainties induced by unmodelled phenomena and measurement error. The developed control algorithm is analyzed in terms of possible control errors and applied to control the firstly presented microvia fill process model.

• 出版日期2014-5