A novel method to fabricate micro-gratings applied for deformation measurement around a crack in a thin film

作者：Wu Dan^*; Xie Huimin; Dai Xianglu; Wang Rong

来源：Measurement Science and Technology, 2014, 25(2): 025012.

DOI：10.1088/0957-0233/25/2/025012

• gratings
• deformation measurement
• focused ion beam (FIB)
• film

The grating fabrication technique has been of great concern in the use of the grating based deformation measurement method. Although various methods have been developed to effectively fabricate gratings, few are able to fabricate gratings directly onto thin films. In this paper, a novel grating fabricating method using focused ion beam deposition is proposed. The advantage of this method is that it causes smaller damage to the surface of the specimen compared with other methods and is especially suitable for deformation measurement of thin films at micro-scales. The fabricated micro-gratings that have been produced by this method have been used to measure the deformation around a crack in an aluminum film supported on a PDMS substrate. The deformation during the crack propagation has been measured with the fabricated micro-grating and the results indicate that this method is feasible to measure the deformation of thin films at micro-scales. It should also be noted that this method can be used to fabricate gratings on various substrates at micro-scales. The successful results indicate that this method is reliable and suitable for deformation measurement at micro-scales.

• 出版日期2014-2
• 单位清华大学