科研之友
微信
新浪微博
Facebook
分享链接
摘要
In particle-in-cell/Monte Carlo collisions (PIC/MCC) simulations of capacitively coupled plasmas (CCPs), the plasma-surface interaction is generally described by a simple model in which a constant secondary electron emission coefficient (SEEC) is assumed for ions bombarding the electrodes. In most PIC/MCC studies of CCPs, this coefficient is set to gamma = 0.1, independent of the energy of the incident particle, the electrode material, and the surface conditions. Here, the effects of implementing energy-dependent secondary electron yields for ions, fast neutrals, and taking surface conditions into account in PIC/MCC simulations is investigated. Simulations are performed using self-consistently calculated effective SEECs, gamma*, for 'clean' (e.g., heavily sputtered) and 'dirty' (e.g., oxidized) metal surfaces in single-and dual-frequency discharges in argon and the results are compared to those obtained by assuming a constant secondary electron yield of gamma = 0.1 for ions. In single-frequency (13.56 MHz) discharges operated under conditions of low heavy particle energies at the electrodes, the pressure and voltage at which the transition between the alpha- and gamma-mode electron power absorption occurs are found to strongly depend on the surface conditions. For 'dirty' surfaces, the discharge operates in alpha-mode for all conditions investigated due to a low effective SEEC. In classical dual-frequency (1.937 MHz + 27.12 MHz) discharges gamma* significantly increases with increasing low-frequency voltage amplitude, V-LF, for dirty surfaces. This is due to the effect of VLF on the heavy particle energies at the electrodes, which negatively influences the quality of the separate control of ion properties at the electrodes. The new results on the separate control of ion properties in such discharges indicate significant differences compared to previous results obtained with different constant values of gamma.
- 出版日期2017-8-1
- 单位中国科学院电工研究所
