Structurally tailored Cu(InxGa1 (-) (x)) Se-2 thin films via RF magnetron sputtering

作者：Jia Tao; Dong Lei; Zhao Zhiguo; Li Xifei; Li Dejun^*

来源：Surface and Coatings Technology, 2014, 259: 94-97.

DOI：10.1016/j.surfcoat.2014.05.006

• RF magnetron sputtering
• Cu(InxGa1- (x))Se-2 (CIGS) thin film
• Substrate temperature
• Chalcopyrite

Cu(InxGa1 (-) (x)) Se-2 (CIGS) thin-films-were deposited onto soda-lime glass substrates with Mo coating via the one step radio frequency (RF) magnetron sputtering without a post-selenization process at the substrate temperature varying from 550 degrees C to 630 degrees C. The effect of deposition temperature on the structural properties of CIGS thin films has been characterized by X-ray diffraction (XRD), Raman spectroscopy, field emission scanning electron microscopy (FESEM), and energy dispersive X-ray spectroscopy (EDX). It was found that an increased deposition temperature of up to 580 degrees C contributes to produce the smooth surface, large grain size, and increased crystallinity of the thin films. But further increased deposition temperature results in a decrease in smoothness and an increase in grain size. The optimized temperature (580 degrees C) shows the best effect on the composition and formation of the chalcopyrite structure without impurities.

• 出版日期2014-11-25
• 单位天津师范大学