科研之友
微信
新浪微博
Facebook
分享链接
摘要
Aiming at solving the problem of online fabrication of micro-tool electrode, a micromachining system based on electrochemical dissolution of material was constructed, which consisted of mechanical movement equipment, ultrashort pulse power supply, circulation system of electrolyte, and hall current sensor for detecting the process status. In the micro-ECM system, the micro tool-electrode and the micro-structures of workpiece can be sequentially machined by means of changing the machining condition. Applying the tungsten tool electrode with 8 mu m diameter and the ultrashort voltage pulses, the micro-cross with a 30 mu m width groove, which had the sharp edge, was obtained. Investigation results show the potential capability of electrochemical micromachining in the manufacture of micro-electromechanical parts.
- 出版日期2011-7
- 单位江苏大学
