A compact time-of-flight mass spectrometer for ion source characterization

作者：Chen, L.^*; Wan, X.; Jin, D. Z.; Tan, X. H.; Huang, Z. X.; Tan, G. B.

来源：Review of Scientific Instruments, 2015, 86(3): 035107.

DOI：10.1063/1.4914588

• Charge composition
• Electron-impact ion sources
• Fundamental research
• Ion spectrum
• Mass resolution
• Orthogonal injections
• Source characterization
• Time-of-flight mass spectrometers

A compact time-of-flight mass spectrometer with overall dimension of about 413 x 250 x 414 mm based on orthogonal injection and angle reflection has been developed for ion source characterization. Configuration and principle of the time-of-flight mass spectrometer are introduced in this paper. The mass resolution is optimized to be about 1690 (FWHM), and the ion energy detection range is tested to be between about 3 and 163 eV with the help of electron impact ion source. High mass resolution and compact configuration make this spectrometer useful to provide a valuable diagnostic for ion spectra fundamental research and study the mass to charge composition of plasma with wide range of parameters.

• 出版日期2015-3
• 单位暨南大学; 中国科学院电工研究所; 上海大学; 中国工程物理研究院