Mapping interfacial excess in atom probe data

作者：Felfer Peter^*; Scherrer Barbara; Demeulemeester Jelle; Vandervorst Wilfried; Cairney Julie M

来源：Ultramicroscopy, 2015, 159: 438-444.

DOI：10.1016/j.ultramic.2015.06.002

• Atom probe tomography
• Interface
• Grain boundary
• Interfacial excess mapping
• Data analysis

Using modern wide-angle atom probes, it is possible to acquire atomic scale 3D data containing 1000 s of nm(2) of interfaces. It is therefore possible to probe the distribution of segregated species across these interfaces. Here, we present techniques that allow the production of models for interfacial excess (IE) mapping and discuss the underlying considerations and sampling statistics. We also show, how the same principles can be used to achieve thickness mapping of thin films. We demonstrate the effectiveness on example applications, including the analysis of segregation to a phase boundary in stainless steel, segregation to a metal-ceramic interface and the assessment of thickness variations of the gate oxide in a fin-FET.

• 出版日期2015-12
• 单位ETH, Zurich