A novel technique for microfabrication of ultra-thin affinity cantilevers for characterization with an AFM

作者：Joshi Manoj^*; Rao V Ramgopal; Mukherji Soumyo

来源：Journal of Micromechanics and Microengineering, 2010, 20(12): 125007.

DOI：10.1088/0960-1317/20/12/125007

A novel, low-cost microfabrication technique for ultra-thin affinity cantilevers to be characterized using an atomic force microscope (AFM) has been demonstrated. Compared to its counterparts reported in the literature, it does not involve a double-sided aligner or deep reactive ion etching (DRIE). Such a microfabrication technique incorporates features like elimination of stiction during the wet release of cantilevers thereby increasing the process yield. It also eliminates the need for laser dicing and allows processing of a large number of cantilevers simultaneously for surface functionalization. Uses of these cantilevers for estimation of the mechanical properties of thin films as well as biosensor applications are demonstrated.

• 出版日期2010-12