Low-temperature poly(oxymethylene) direct bonding via self-assembled monolayer

作者：Fu Weixin^*; Ma Bo; Kuwae Hiroyuki; Shoji Shuichi; Mizuno Jun

来源：Japanese Journal of Applied Physics, 2018, 57(2): 02BB01.

DOI：10.7567/JJAP.57.02BB01

A direct bonding of poly(oxymethylene) (POM) was feasible at 100 degrees C by using self-assembled monolayer (SAM) as a surface modification method. (3-aminopropyl) triethoxysilane (APTES) and (3-glycidyloxypropyl) trimethoxysilane (GOPTS) were used in our work. X-ray photoelectron spectroscopy showed that both APTES and GOPTS modified the POM surface successfully. Bonding strength evaluation revealed that surface modification was affected by pretreatment (VUV/O-3) process time. In addition, the bonding condition with highest strength had an average strength of 372 kPa. This technology is expected to be used in packaging for micro-/nano-electromechanical systems, such as biomedical devices.

• 出版日期2018-2