An optical MEMS pressure sensor based on a phase demodulation method

作者：Ge Yixian; Wang Ming^*; Chen Xuxing; Rong Hua

来源：Sensors and Actuators A: Physical , 2008, 143(2): 224-229.

DOI：10.1016/j.sna.2007.10.086

• optical fiber sensor
• F-P interference
• MEMS
• phase demodulation

A novel optical fiber pressure sensor based on a Fabry-Perot (FP) interferometer and phase demodulation method is described. MEMS techniques and common communication devices are used to fabricate the sensor. The principle of pressure measurement has been introduced; the relationship between silicon membrane size and sensor performance has been simulated. A phase demodulation method based on a Fourier transformation is explored, which can reduce errors resulting from intensity variations of a light source. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, and a wide pressure measurement range from 0 to 3 Mpa.

• 出版日期2008-5-16
• 单位南京师范大学