Development of a-Si solar cells using "liquid-Si printing"

作者：Murayama Hiroko^*; Ohyama Tatsushi; Terakawa Akira; Takagishi Hideyuki; Masuda Takashi; Ohdaira Keisuke; Shimoda Tatsuya

来源：Canadian Journal of Physics, 2014, 92(7-8): 928-931.

DOI：10.1139/cjp-2013-0635

Film properties of hydrogenated amorphous silicon (a-Si: H) fabricated by "liquid-Si printing" (LSP) were investigated in detail and compared to the conventional plasma enhanced chemical deposition (plasma-CVD) method. LSP a-Si: H films (LSP films) had lower film density and larger size void than the a-Si: H films deposited by plasma-CVD (CVD films). On the other hand, the LSP films had high photoconductivity comparable to device grade a-Si: H films and higher photostability than the CVD films. Thus, the LSP films were drastically different from conventional CVD films. The conversion efficiency of the bifacial solar cells (glass/TCO/n(LSP film)/i(LSP film)/p(CVD film)/TCO/electrode), which was a problem because of the missing link between high photoconductivity and low cell performance, were improved. Undoped CVD film was inserted between the i- and p-layers to suppress the plasma damage to the active layer printed by LSP when depositing a B doped a-Si: H by plasma-CVD. As a result, we achieved conversion efficiencies of 1.1% with n side incidence and 3.1% with p side incidence.

• 出版日期2014-7