An On-Chip CMOS Temperature Sensor Using Self-Discharging P-N Diode in a Delta-Sigma Loop

作者：Chowdhury Golam^*; Hassibi Arjang

来源：IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS, 2018, 65(6): 1887-1896.

DOI：10.1109/TCSI.2017.2774040

• CMOS
• temperature sensor
• diode
• delta-sigma
• thermal management

A CMOS temperature sensor to monitor on-chip distributed thermal profile of high-performance system-on-chips (SoCs) is presented. The architecture of this sensor utilizes a self-discharging p-n diode to implement a first-order delta-sigma (Delta-Sigma) loop. To determine the on-chip temperature, the temperature-dependent reverse-bias leakage current of the diode is measured. The sensor is implemented in a 0.18-mu m CMOS process and it occupies a small area of 550 mu m(2). Performance measurements demonstrate the on-chip sensor inaccuracies of +/- 0.1 degrees C (3 sigma) with calibration, and +/- 0.5 degrees C (3 sigma) without any calibration, over 35 degrees C-100 degrees C, which is the functional temperature range of current high-performance SoCs. The sensor, excluding the digital and any reference generators, consumes 4 mu W from a single 1.8-V supply. The worst case resolution of the sensor is 75 mK at 2-Hz bandwidth with the overall sensor figure of merit of 11 nJ degrees K-2.

• 出版日期2018-6